This data set contains all data used in preparation of the manuscript "Investigating the Impact of ITO Substrates on the Optical and Electronic Properties of WSe2 Monolayers". This dataset contains Images and Spectra in various formats. The PL and XPS spectra files with graphs are in OriginLab Origin OPJ or OPJU formats. These files can be opened with Origin Free Viewer (https://www.originlab.com/viewer/) and have their contents viewed and extracted. The STS spectra used for statistical analysis are in ASCII format and can be opened with software such as OriginLAB, Microsoft Excel or Notepad. The DAT files of the STS statistical analysis can be opened with Notepad software. The SM4 and M files can be opened using the software MathLab, https://www.mathworks.com/products/matlab.html. AFM and KPFM images are in the GWY format and can be opened using the software Gwyddion, http://gwyddion.net/. Optical microscopy Images are in usual format TIFF and JPG. In most cases, the data has from as measured (raw data) up to the final version for the graphs in the manuscript.